Soft-pad grinding of 300 mm wire-sawn silicon wafers: finite element analysis with designed experiments

Author: Wu Jian (Jessie)   Sun Xuekun   Pei Z.J.   Xin X. Jack   Simmelink Kelli  

Publisher: Inderscience Publishers

ISSN: 1368-2148

Source: International Journal of Manufacturing Technology and Management, Vol.13, Iss.2-3, 2008-01, pp. : 169-186

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