Simultaneous double side grinding of silicon wafers: a mathematical model for the wafer shape

Author: Li Z.C.   Pei Z.J.   Fisher Graham R.  

Publisher: Inderscience Publishers

ISSN: 1746-9392

Source: International Journal of Nanomanufacturing, Vol.2, Iss.6, 2009-02, pp. : 556-571

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