Integrated Laser Measuring System for the Ellipsometric and Photovoltage Characterization of Thin Surface Layers

Author: Kotenev V. A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.32, Iss.6, 2003-11, pp. : 355-360

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Abstract