![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Kim C.S. Kim S.K. Lee S.Y.
Publisher: Elsevier
ISSN: 1369-8001
Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 93-96
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)