Evaluation of Si-Wafer Chemical Cleaning Procedures in Terms of Their Effect on Wafer Topography

Author： Timoshenkov S. P.   Kalugin V. V.   Prokopiev E. P.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.32, Iss.6, 2003-11, pp. : 371-376

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