Silicon-Surface Restructuring under Cleaning as a Method for Improving Al/Mo-to-Si Contact Resistance and Microwave-BJT Parameters

Author： Snitovsky Yu. P.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.33, Iss.5, 2004-09, pp. : 298-302

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