Combined effect of V2O5 and NH3 on thermal oxidation of InP

Author: Mittova I.   Lavrushina S.   Sycheva M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.34, Iss.1, 2005-01, pp. : 43-46

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Abstract