Sustaining Mechanisms of the ECR Heating of Electrons in Low-Pressure Microwave Plasmas under Magnetic Multipole Confinement

Author: Petrin A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.34, Iss.5, 2005-09, pp. : 295-308

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