Void transformation and dopant distribution in porous silicon

Author: Kovalevskii A.   Dolbik A.   Unuchek D.   Tarasikov M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.36, Iss.1, 2007-02, pp. : 49-52

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Abstract