Specific features of the bulk etching of single-crystal semiconducting silicon in aqueous KOH solutions

Author： Baranov I.   Tabulina L.   Stanovaya L.   Rusal’skaya T.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1070-4272

Source： Russian Journal of Applied Chemistry, Vol.83, Iss.6, 2010-06, pp. : 978-983

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