Bulk vertical micromachining of single-crystal sapphire using inductively coupled plasma etching for x-ray resonant cavities

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|1|15016-15024

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.1, 2015-01, pp. : 15016-15024

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