Preparation of amorphous carbon nitride films from toluene and nitrogen by rf-PECVD

Author: Aono M.   Yamaguchi K.   Kitazawa N.   Watanabe Y.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.20, Iss.9, 2004-09, pp. : 1119-1122

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract