Energy filtering TEM analysis of nanoelectronic device structures: fast and efficient way to assess chemical microstructures

Author: Weirich T. E.   Reinholdt A.   Kreibig U.   Mayer J.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.24, Iss.6, 2008-06, pp. : 667-674

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