Wafer prealigning robot based on shape center calculation

Author： Fu Z.   Huang C.X.   Liu R.Q.   Zhao Y.Z.   Cao Q.X.  

Publisher： Emerald Group Publishing Ltd

ISSN： 0143-991X

Source： Industrial Robot: An International Journal, Vol.35, Iss.6, 2008-10, pp. : 536-540

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