Accurate and steady control on trajectory tracking for the wafer transfer robot

Author: Liu Yanjie   Cao Yumei   Sun Lining   Zheng Xiaofei  

Publisher: Emerald Group Publishing Ltd

ISSN: 0143-991X

Source: Industrial Robot: An International Journal, Vol.37, Iss.6, 2010-10, pp. : 552-561

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Abstract