Structural change of micropipes in Al-implanted SiC crystals by post-implantation annealing

Author: Ishiji Kotaro   Ohtani Ryota   Kawado Seiji   Hirai Yasuharu   Nagamachi Shinji  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.26, Iss.2, 2011-02, pp. : 25009-25013

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Abstract