Microwave Annealing of High Dose Al+-implanted 4H-SiC: Towards Device Fabrication

Author: Nath A.   Rao Mulpuri   Tian Y.   Parisini A.   Nipoti R.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.43, Iss.4, 2014-04, pp. : 843-849

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