Author: Engstrøm Daniel S Rupesinghe Nalin L Teo Kenneth B K Milne William I Bøgild Peter
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15004-15010
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Abstract
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