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Author: Tantawi Khalid H M Oates Janeczka Kamali-Sarvestani Reza Bergquist Nathan Williams John D
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 17001-17006
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Abstract
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