Processing of photosensitive APEX™ glass structures with smooth and transparent sidewalls

Author: Tantawi Khalid H M   Oates Janeczka   Kamali-Sarvestani Reza   Bergquist Nathan   Williams John D  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 17001-17006

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