Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films

Author： Tung Ryan C     Sumali Hartono   Raman Arvind  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25003-25008

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