Microchannel formation through Foturan® with infrared femtosecond and ultraviolet nanosecond lasers

Author: Fernández-Pradas J M   Serrano D   Morenza J L   Serra P  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25005-25012

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Abstract