Fabrication and evaluation of an on-chip liquid micro-variable inductor

Author:     Boukabache Ali   Pons Patrick   Fulcrand Rémy   Pinon Stéphane   Boussetta Hatem     Besbes Kamel  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25018-25026

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Abstract