Experimental study of heat-treated thin film Ti/Pt heater and temperature sensor properties on a Si microfluidic platform

Author： Resnik D Vrtačnik D Možek M Pečar B Amon S

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25025-25034

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Annealing effect on microstructure and mechanical properties of magnetron sputtering Ti‐Si‐C thin film

By Chen Z S Li H J Fu Q G Yang D Shen Q L

Materials Science and Technology, Vol. 29, Iss. 8, 2013-08 ,pp. : 975-979

Maney Publishing

Access to resources Recommend Favorite

ELECTRIC FATIGUE PROPERTIES OF Pb(Zr,Ti)O 3 THIN FILMS GROWN ON LaNiO 3 BUFFER Pt/Ti/SiO 2 /Si SUBSTRATE BY METALORGANIC CHEMICAL VAPOR DEPOSITION

By ZHAI JIWEI YAO XI XU ZHENGKUI CHEN HAYDN

Integrated Ferroelectrics, Vol. 75, Iss. 1, 2005-10 ,pp. : 47-54

Taylor & Francis Ltd

Access to resources Recommend Favorite

The estimation of temperature and hardness distribution in heat-treated complex-shaped components

By Palaniradja K. Soundararajan V. Alagumurthi N. Elamaran J.

International Journal of Microstructure and Materials Properties, Vol. 3, Iss. 4-5, 2008-12 ,pp. : 548-562

Inderscience Publishers

Access to resources Recommend Favorite

THE TEMPERATURE PROPERTIES OF THIN FILM PIEZOELECTRIC MATERIALS

By JOUNG-YOUNG SUG SU-HO LEE JUN-YONG CHOI SOON-CHEOL PARK JU-HYUN YOO GEON SA-GONG

Integrated Ferroelectrics, Vol. 99, Iss. 1, 2008-01 ,pp. : 41-59

Taylor & Francis Ltd

Access to resources Recommend Favorite

Pt/SiO₂ and Pt/TiO₂/Ti compositions and their catalytic properties

By Rudnev V. Medkov M. Steblevskaya N. Lukiyanchuk I. Tyrina L. Belobeletskaya M.

Theoretical Foundations of Chemical Engineering, Vol. 45, Iss. 4, 2011-08 ,pp. : 496-499

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite