Microfabrication of fine electron beam tunnels using UV-LIGA and embedded polymer monofilaments for vacuum electron devices

Author: Joye Colin D   Calame Jeffrey P   Nguyen Khanh T   Garven Morag  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15010-15019

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract