Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness

Author： Shavezipur M   Nieva P   Hashemi S M   Khajepour A  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25022-25031

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