Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes

Author： Ozdogan Mehmet   Towfighian Shahrzad  

Publisher： MDPI

E-ISSN： 2072-666x|7|3|42-42

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.3, 2016-03, pp. : 42-42

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