A novel method of hotspot temperature reduction for a 3D stacked CMOS IC chip device fabricated on an ultrathin substrate

Author: Kato Fumiki   Nakagawa Hiroshi   Aoyagi Masahiro  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25020-25025

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