Author: Lin Chih-Ming Chen Yung-Yu Felmetsger Valery V Lien Wei-Cheng Riekkinen Tommi Senesky Debbie G Pisano Albert P
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25019-25026
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