Author: Grogg Daniel Drechsler Ute Knoll Armin Duerig Urs Pu Yu Hagleitner Christoph Despont Michel
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25024-25031
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Abstract
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