A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry

Author： Mulloni V   Colpo S   Faes A   Margesin B  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25025-25032

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