Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared

Author: Tuohiniemi M   Näsilä A   Mäkynen J  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75011-75017

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