Cracking of selected hydrocarbon gases in a low-power, low-pressure RF plasma

Author： Jiao Charles Q   Ganguly Biswa N   Garscadden Alan  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15013-15018

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

RF power absorption by plasma of a low-pressure inductive discharge

By Kralkina E A   Rukhadze A A   Pavlov V B   Vavilin K V   Nekliudova P A   Petrov A K   Alexandrov A F  

Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 15016-15027

IOP Publishing

Access to resources Recommend Favorite

Low-power inductive RF plasma sources for technological applications

By Vavilin K.   Rukhadze A.   Ri M.   Plaksin V.  

Plasma Physics Reports, Vol. 30, Iss. 8, 2004-08 ,pp. : 687-697

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Formation of dust in low-pressure magnetized hydrocarbon plasmas

By  

New Journal of Physics, Vol. 13, Iss. 6, 2011-06 ,pp. : 78-86

IOP Publishing

Access to resources Recommend Favorite

Extinction of RF capacitive low-pressure discharges

By  

EPL (EUROPHYSICS LETTERS), Vol. 71, Iss. 3, 2005-08 ,pp. : 407-411

Edp Sciences

Access to resources Recommend Favorite

Low-power rf plasma sources for technological applications: I. Plasma sources without a magnetic field

By Vavilin K.   Rukhadze A.   Ri M.   Plaksin V.  

Technical Physics, Vol. 49, Iss. 5, 2004-05 ,pp. : 565-571

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite