A Comparison of the Lateral Resolutions of Optical and Interference Microscopes

Author： Levin G.   Moiseev N.   Minaev V.   Ilyushin Ya.  

Publisher： Springer Publishing Company

ISSN： 0543-1972

Source： Measurement Techniques, Vol.56, Iss.9, 2013-12, pp. : 1038-1042

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