Low Temperature Performance of Miniature Capacitive Pressure Sensor with Submicron Gap

Author: Hieda M.   Kato T.   Hirano D.   Matsushita T.   Wada N.  

Publisher: Springer Publishing Company

ISSN: 0022-2291

Source: Journal of Low Temperature Physics, Vol.138, Iss.3-4, 2005-02, pp. : 917-921

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Abstract