Fabrication of high aspect ratio silicon micro-tips for field emission devices

Author： Chung I.J.   Murfett D.B.   Hariz A.   Haskard M.R.  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.32, Iss.18, 1997-12, pp. : 4999-5003

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Fabrication of High-Aspect-Ratio Structural Change Microregions in Silicon Carbide by Femtosecond Bessel Beams

By  

Advanced Materials Research, Vol. 2015, Iss. 1102, 2015-06 ,pp. : 143-147

Trans Tech Publications

Access to resources Recommend Favorite

Parameter Optimization for Grinding Process of Micropores with High Aspect Ratio

By  

Advanced Materials Research, Vol. 2015, Iss. 1095, 2015-04 ,pp. : 795-799

Trans Tech Publications

Access to resources Recommend Favorite

One-Pot Synthesis of High Aspect Ratio Copper Nanowires in Aqueous Solution

By  

Advanced Materials Research, Vol. 2015, Iss. 1119, 2015-08 ,pp. : 34-37

Trans Tech Publications

Access to resources Recommend Favorite

High efficiency light emitting devices in silicon

By Castagna M.E.   Coffa S.   Monaco M.   Muscara A.   Caristia L.   Lorenti S.   Messina A.  

Materials Science and Engineering: B, Vol. 105, Iss. 1, 2003-12 ,pp. : 82-89

Elsevier

Access to resources Recommend Favorite

Mask Design Consideration for Low Aspect Ratio Wet Etch Micromachining on Silicon Substrate Planar Power Transformer

By  

Advanced Materials Research, Vol. 2015, Iss. 1109, 2015-07 ,pp. : 227-231

Trans Tech Publications

Access to resources Recommend Favorite