The influence of diluent gas composition and temperature on SiC nanopowder formation by CVD

Author: Gupta Aparna   Ghosh Tridib   Jacob Chacko  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.42, Iss.13, 2007-07, pp. : 5142-5146

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Abstract