Influence of ion energy on damage induced by Au-ion implantation in silicon carbide single crystals

Author： Gentils Aurélie   Linez Florence   Canizarès Aurélien   Simon Patrick   Thomé Lionel   Barthe Marie-France  

Publisher： Springer Publishing Company

ISSN： 0022-2461

Source： Journal of Materials Science, Vol.46, Iss.19, 2011-10, pp. : 6390-6395

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