Reactive Ion Beams Sputtering of Vanadium Oxides Films for Uncooled Microbolometer

Author: Wang Hongchen   Yi Xinjian   Chen Sihai   He Shaowei   Fu Xiaochao  

Publisher: Springer Publishing Company

ISSN: 0195-9271

Source: International Journal of Infrared and Millimeter Waves, Vol.26, Iss.3, 2005-03, pp. : 421-431

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Abstract