Etching Mechanism of Pb(Zr,Ti)O₃ Thin Films in Cl₂/Ar Plasma

Author： Efremov A.M. Kim D.P. Kim K.T. Kim C.I.

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.24, Iss.1, 2004-03, pp. : 13-28

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