UV Absorptance of Titanium Dioxide Thin Films by Plasma Enhanced Deposition from Mixtures of Oxygen and Titanium-Tetrakis-Isopropoxide

Author： Sonnenfeld Axel   von Sonnenfeld Philipp   Hauert Roland  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.26, Iss.3, 2006-06, pp. : 319-334

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