Experimental Study of Capacitive RF c-C4F8 Discharge with Synchrotron Vacuum Ultraviolet Photoionization Mass Spectrometry

Author： Zhou Zhongyue   Xie Mingfeng   Tang Tang   Zhang Yijun   Yuan Tao   Qi Fei   Ni Tom   Qian Xueyu  

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.30, Iss.3, 2010-06, pp. : 391-400

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