Time Resolved Spectroscopic Characterization of a-C:H Deposition by Methane and Removal by Oxygen Inductively Coupled RF Plasma

Author： Bišćan M. Kregar Z. Krstulović N. Milošević S.

Publisher： Springer Publishing Company

ISSN： 0272-4324

Source： Plasma Chemistry and Plasma Processing, Vol.30, Iss.3, 2010-06, pp. : 401-412

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