The effect of He or Ar/O2 plasma treatment on Si surface prior to chemical vapor deposition of SiO2

Author: Kim H-U.   Yi C.   Rhee S-W.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.15, Iss.1, 2004-01, pp. : 37-41

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