Microstructural characteristics and carbon content of Al2O3 films as a function of deposition parameters

Author: Guzmán-Mendoza J.   Garcia-Hipolito M.   Aguilar-Frutis M.   Falcony C.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.15, Iss.9, 2004-09, pp. : 629-633

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