Optical, structural and electrical characteristics of aluminum oxynitride thin films deposited in an Ar-N gas mixture RF-sputtering system

Author: Araiza J.   Aguilar-Frutis M.   Falcony C.   Jergel Ma.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.16, Iss.10, 2005-10, pp. : 657-661

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