A DLTS study on plasma-hydrogenated n-type high-resistivity magnetic Cz silicon

Author: Huang Y.   Simoen E.   Claeys C.   Rafí J.   Clauws P.  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.18, Iss.7, 2007-07, pp. : 705-710

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Abstract