Germanium content dependence of the leakage current of recessed SiGe source/drain junctions

Author： Simoen Eddy Bargallo Gonzalez Mireia Eneman Geert Verheyen Peter Benedetti Aldo Bender Hugo Loo Roger Claeys Cor

Publisher： Springer Publishing Company

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.18, Iss.7, 2007-07, pp. : 787-791

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