Investigation of the Near-Surface Silicon Layers in SiO2–Si Structures

Author: Kulinich O. A.   Glauberman M. A.   Sadova N. N.  

Publisher: Springer Publishing Company

ISSN: 1064-8887

Source: Russian Physics Journal, Vol.46, Iss.10, 2003-10, pp. : 1029-1033

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