Scandium dipivaloyl methanate as a volatile precursor for thin film deposition

Author： Mészáros-Szécsényi K.   Päiväsaari J.   Putkonen M.   Niinistö L.   Pokol G.  

Publisher： Springer Publishing Company

ISSN： 1388-6150

Source： Journal of Thermal Analysis and Calorimetry, Vol.69, Iss.1, 2002-07, pp. : 65-75

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