A PIEZOELECTRICALLY ACTUATED MEMS SPEAKER WITH POLYIMIDE MEMBRANE AND THIN FILM Pb(Zr,Ti)O3(PZT) ACTUATOR

Author: CHO IL-JOO   JANG SEONGSOO   NAM HYO-JIN  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.105, Iss.1, 2009-01, pp. : 27-36

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